Beilstein J. Nanotechnol.2017,8, 682–687, doi:10.3762/bjnano.8.73
resultant pore diameter. In return, the pore dimension as a function of the exposure dose brings out the ion beam profiles. Using this method of determining an ion-beampointspreadfunction, we verify a Gaussian profile of focused gallium ion beams. Graphene sputtering yield is extracted from the
source. Our method of profiling ion beams with 2D-layer perforation provides more information on ion beam profiles than the conventional sharp-edge scan method does.
Keywords: exposure dose; focused ion beam; freestanding 2D layer; graphene; ion beam diameter; ionbeampointspreadfunction
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Figure 1:
(a) STEM-BF image of a graphene membrane perforated with a 1.5 pA Ga-FIB. Pores diameter increases ...